We demonstrated a sensing technique for in-line ablation rate detection using a quantum cascade laser (QCL) under external optical feedback. The design of the QCL-based diagnostic system allowed to monitor the voltage modulation at the laser terminals induced by fast dynamics in the ablation process. Real-time detection of the ablation front velocity as well as in-situ investigations of the surface temperature were provided. Experimental results on fast ablation rates per pulse correlate well with the theoretical prediction. The detection range was demonstrated to be limited only by the QCL-probe emission wavelength, which is scalable up to the THz spectral region.
Quantum cascade laser-based sensing to investigate fast laser ablation process / Mezzapesa, F. P.; Spagnolo, Vincenzo Luigi; Ancona, A.; Scamarcio, G.. - 8607:(2013). (Intervento presentato al convegno Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII tenutosi a San Francisco, CA nel February 4-7, 2013) [10.1117/12.2001148].
Quantum cascade laser-based sensing to investigate fast laser ablation process
SPAGNOLO, Vincenzo Luigi;
2013-01-01
Abstract
We demonstrated a sensing technique for in-line ablation rate detection using a quantum cascade laser (QCL) under external optical feedback. The design of the QCL-based diagnostic system allowed to monitor the voltage modulation at the laser terminals induced by fast dynamics in the ablation process. Real-time detection of the ablation front velocity as well as in-situ investigations of the surface temperature were provided. Experimental results on fast ablation rates per pulse correlate well with the theoretical prediction. The detection range was demonstrated to be limited only by the QCL-probe emission wavelength, which is scalable up to the THz spectral region.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
