A submicrometer integrated optical sensor based on Bragg gratings in silicon-on-insulator technology is theoretically proposed in this paper. The grating analysis is performed using a mixed numerical approach based on the finite-element method and coupled mode theory. The possibility to use third-order instead of first-order grating is discussed and performances compared, thus overcoming fabrication problems associated to submicrometer scale features. A detection limit of approximately 10 4 refractive index unit has been calculated for a 173- m-long grating. Strategies to further improve this value have been discussed too. Finally, fabrication tolerances influence on optimized gratings has been investigated.
|Autori interni:||PASSARO, Vittorio|
DE LEONARDIS, Francesco
|Titolo:||Design of Bragg Grating Sensors Based on Sub-Micrometer Optical Rib Waveguides in SOI|
|Rivista:||IEEE SENSORS JOURNAL|
|Data di pubblicazione:||2008|
|Digital Object Identifier (DOI):||10.1109/JSEN.2008.929068|
|Appare nelle tipologie:||1.1 Articolo in rivista|