A submicrometer integrated optical sensor based on Bragg gratings in silicon-on-insulator technology is theoretically proposed in this paper. The grating analysis is performed using a mixed numerical approach based on the finite-element method and coupled mode theory. The possibility to use third-order instead of first-order grating is discussed and performances compared, thus overcoming fabrication problems associated to submicrometer scale features. A detection limit of approximately 10 4 refractive index unit has been calculated for a 173- m-long grating. Strategies to further improve this value have been discussed too. Finally, fabrication tolerances influence on optimized gratings has been investigated.
Design of Bragg Grating Sensors Based on Sub-Micrometer Optical Rib Waveguides in SOI / Passaro, Vittorio; Loiacono, R; D'Amico, G; DE LEONARDIS, Francesco. - In: IEEE SENSORS JOURNAL. - ISSN 1530-437X. - 8:9(2008), pp. 1603-1611. [10.1109/JSEN.2008.929068]
Design of Bragg Grating Sensors Based on Sub-Micrometer Optical Rib Waveguides in SOI
PASSARO, Vittorio;DE LEONARDIS, Francesco
2008-01-01
Abstract
A submicrometer integrated optical sensor based on Bragg gratings in silicon-on-insulator technology is theoretically proposed in this paper. The grating analysis is performed using a mixed numerical approach based on the finite-element method and coupled mode theory. The possibility to use third-order instead of first-order grating is discussed and performances compared, thus overcoming fabrication problems associated to submicrometer scale features. A detection limit of approximately 10 4 refractive index unit has been calculated for a 173- m-long grating. Strategies to further improve this value have been discussed too. Finally, fabrication tolerances influence on optimized gratings has been investigated.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
