A submicrometer integrated optical sensor based on Bragg gratings in silicon-on-insulator technology is theoretically proposed in this paper. The grating analysis is performed using a mixed numerical approach based on the finite-element method and coupled mode theory. The possibility to use third-order instead of first-order grating is discussed and performances compared, thus overcoming fabrication problems associated to submicrometer scale features. A detection limit of approximately 10 4 refractive index unit has been calculated for a 173- m-long grating. Strategies to further improve this value have been discussed too. Finally, fabrication tolerances influence on optimized gratings has been investigated.

Design of Bragg Grating Sensors Based on Sub-Micrometer Optical Rib Waveguides in SOI / Passaro, Vittorio; Loiacono, R; D'Amico, G; DE LEONARDIS, Francesco. - In: IEEE SENSORS JOURNAL. - ISSN 1530-437X. - 8:9(2008), pp. 1603-1611. [10.1109/JSEN.2008.929068]

Design of Bragg Grating Sensors Based on Sub-Micrometer Optical Rib Waveguides in SOI

PASSARO, Vittorio;DE LEONARDIS, Francesco
2008-01-01

Abstract

A submicrometer integrated optical sensor based on Bragg gratings in silicon-on-insulator technology is theoretically proposed in this paper. The grating analysis is performed using a mixed numerical approach based on the finite-element method and coupled mode theory. The possibility to use third-order instead of first-order grating is discussed and performances compared, thus overcoming fabrication problems associated to submicrometer scale features. A detection limit of approximately 10 4 refractive index unit has been calculated for a 173- m-long grating. Strategies to further improve this value have been discussed too. Finally, fabrication tolerances influence on optimized gratings has been investigated.
2008
Design of Bragg Grating Sensors Based on Sub-Micrometer Optical Rib Waveguides in SOI / Passaro, Vittorio; Loiacono, R; D'Amico, G; DE LEONARDIS, Francesco. - In: IEEE SENSORS JOURNAL. - ISSN 1530-437X. - 8:9(2008), pp. 1603-1611. [10.1109/JSEN.2008.929068]
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11589/2170
Citazioni
  • Scopus 46
  • ???jsp.display-item.citation.isi??? 40
social impact