We present different examples of non-equilibrium plasma modeling interesting technological applications. In particular we discuss some aspects of plasma modeling in excimer lasers, negative ion sources, nitrogen afterglow and RF discharges emphasizing the theoretical common points linking different applications.
Non-Equilibrium Plasma Modeling / Capitelli, M.; Celiberto, R.; Capriati, G.; Gorse, C.; Longo, S.. - STAMPA. - (1992), pp. 58-80. ( Workshop on plasma technology and applications Lucca, Italy July 5-6, 1991) [10.1007/978-1-4615-3400-6_5].
Non-Equilibrium Plasma Modeling
R. Celiberto;
1992
Abstract
We present different examples of non-equilibrium plasma modeling interesting technological applications. In particular we discuss some aspects of plasma modeling in excimer lasers, negative ion sources, nitrogen afterglow and RF discharges emphasizing the theoretical common points linking different applications.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
