We present different examples of non-equilibrium plasma modeling interesting technological applications. In particular we discuss some aspects of plasma modeling in excimer lasers, negative ion sources, nitrogen afterglow and RF discharges emphasizing the theoretical common points linking different applications.
Non-Equilibrium Plasma Modeling / Capitelli, M.; Celiberto, R.; Capriati, G.; Gorse, C.; Longo, S.. - STAMPA. - (1992), pp. 58-80. (Intervento presentato al convegno Workshop on plasma technology and applications tenutosi a Lucca, Italy nel July 5-6, 1991) [10.1007/978-1-4615-3400-6_5].
Non-Equilibrium Plasma Modeling
R. Celiberto;
1992-01-01
Abstract
We present different examples of non-equilibrium plasma modeling interesting technological applications. In particular we discuss some aspects of plasma modeling in excimer lasers, negative ion sources, nitrogen afterglow and RF discharges emphasizing the theoretical common points linking different applications.File in questo prodotto:
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