Slab waveguides were fabricated in tellurite glasses by means of nitrogen ion implantation, using a wide range of ion doses (from 5x1012 to 8x1016 ions/cm2), in order to investigate their effects on the induced refractive index change. The results of the characterization, carried out by means of dark-line spectroscopy, show the presence of an optical barrier with a decrease of the refractive index at the end of range. Annealing post-implantation process was performed at different temperatures on higher doses (≥1016 ions/cm2) ion implanted slab waveguides and the characterization showed a decrease of the barrier effect probably due to a corresponding reduction of the defects inside the glass matrix.
Annealing effect on optical barrier in ion-implanted tellurite glass waveguides / S., Berneschi; I., Cacciari; G., Nunzi Conti; S., Pelli; G. C., Righini; I., Bányász; N. Q., Khanh; T., Lohner; P., Petrik; Z., Zolnai; M., Bettinelli; A., Speghini; Mescia, Luciano; Prudenzano, Francesco (PROCEEDINGS OF SPIE, THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING). - In: Integrated optics : devices, materials, and technologies XIII : 26-28 January 2009, San Jose, California, USA / [a cura di] Jean-Emmanuel Broquin, Christoph M. Greiner. - STAMPA. - Bellingham, WA : Society of Photo-Optical Instrumentation Engineers, 2009. - ISBN 978-081947464-3. [10.1117/12.811153]
Annealing effect on optical barrier in ion-implanted tellurite glass waveguides
MESCIA, Luciano;PRUDENZANO, Francesco
2009-01-01
Abstract
Slab waveguides were fabricated in tellurite glasses by means of nitrogen ion implantation, using a wide range of ion doses (from 5x1012 to 8x1016 ions/cm2), in order to investigate their effects on the induced refractive index change. The results of the characterization, carried out by means of dark-line spectroscopy, show the presence of an optical barrier with a decrease of the refractive index at the end of range. Annealing post-implantation process was performed at different temperatures on higher doses (≥1016 ions/cm2) ion implanted slab waveguides and the characterization showed a decrease of the barrier effect probably due to a corresponding reduction of the defects inside the glass matrix.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.