Full‐Domain 3D Digital Twin for Comprehensive Analysis and Validation of Standing Surface Acoustic Wave Generation on LiNbO3 Substrate

Standing Surface Acoustic Waves (SSAWs) generated on a piezoelectric sub-strate are largely used to create stable surface force patterns in active lab-on-a-chip devices. This study presents the development and experimental validationof a full-domain 3D digital twin for a SSAW device based on 128° YX LiNbO3 ,commonly used for acoustofluidic applications. The model is developedin COMSOL Multiphysics to accurately capture the electromechanical interac-tions that govern SSAW generation and its interaction with the substrate. Itspredictive accuracy is validated through electrical characterization with a vectornetwork analyzer and surface displacement mapping with a laser Dopplervibrometer, demonstrating strong agreement between simulations and experi-mental data. This validation proves the reliability of digital twins for predictivemodeling and design optimization of SSAW devices, offering a more preciseand efficient alternative to traditional models and trial-and-error approaches.