In this paper, novel high-performance group IV photonic structures for very efficient gas sensing are presented. Various combinations of group IV materials and alloys based on silicon (Si), germanium (Ge), tin (Sn) and carbon (C), have been studied in CMOS-compatible technology for design of optical slot waveguides for homogeneous optical sensors in mid-IR (3.39 mu m). An analysis of fabrication tolerances is presented and a comparison among different photonic sensing structures is also given. Theoretical investigation demonstrates very efficient optical field concentrations in the sensing area, as well as ultra high sensitivity of gas sensing for environmental applications.
Group IV Photonic Slot Structures for Highly Efficient Gas Sensing in mid-IR / Passaro, Vittorio M. N.; Troia, Benedetto; De Leonardis, Francesco). - ELETTRONICO. - (2011), pp. 103-108. (Intervento presentato al convegno 2nd International Conference on Sensor Device Technologies and Applications, SENSORDEVICES 2011 tenutosi a Nice, France nel August 21-27, 2011).
Group IV Photonic Slot Structures for Highly Efficient Gas Sensing in mid-IR
Passaro, Vittorio M. N.;De Leonardis, Francesco)
2011-01-01
Abstract
In this paper, novel high-performance group IV photonic structures for very efficient gas sensing are presented. Various combinations of group IV materials and alloys based on silicon (Si), germanium (Ge), tin (Sn) and carbon (C), have been studied in CMOS-compatible technology for design of optical slot waveguides for homogeneous optical sensors in mid-IR (3.39 mu m). An analysis of fabrication tolerances is presented and a comparison among different photonic sensing structures is also given. Theoretical investigation demonstrates very efficient optical field concentrations in the sensing area, as well as ultra high sensitivity of gas sensing for environmental applications.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
