We are pursuing scribe-cleave-passivate (SCP) technology of making "slim edge" sensors. Such sensors have only a minimal amount of inactive peripheral region, which benefits construction of large area tracker and imaging systems. Key application steps of this method are surface scribing, cleaving, and passivation of the resulting sidewall. We are working on developing both the technology and physical understanding of the processed devices performance. In this paper we begin by reviewing the manufacturing options of SCP technology. Then we show new results regarding the technology automation and device physics performance. The latter includes charge collection efficiency near the edge and radiation hardness study. We also report on the status of devices processed at the request of the RD50 collaborators. (C) 2013 Elsevier B.V. All rights resented.
|Titolo:||Scribe-cleave-passivate (SCP) slim edge technology for silicon sensors|
|Data di pubblicazione:||2013|
|Digital Object Identifier (DOI):||10.1016/j.nima.2013.03.046|
|Appare nelle tipologie:||1.1 Articolo in rivista|