Electron energy distribution functions (EEDF) and related properties in the bulk region of the rf CO plasma at the reduced rf field frequency ohgr/p0=pgr×107 sec–1 torr–1 have been calculated by solving the time-dependent spatially homogeneous Boltzmann equation in the presence of second-kind collisions and have been interpreted on a microphysical basis. The results show that second-kind collisions (vibrational and electronic) strongly affect the temporal evolution of EEDF, of the mean energy, and of the mean collision frequencies for vibrational and electronic excitation processes, as well as for ionization. In particular, second-kind collisions in the CO rf bulk plasma strongly decrease the modulation of the mean ionization frequency during its periodical alteration in the rf field. Furthermore, the effect of second-kind collisions on an approximate determination of the time-averaged EEDF in the rf bulk plasma using the so-called effective-field appriximation has been estimated.
|Titolo:||Electron kinetics of collision dominated r.f. bulk plasma in CO: The role of second-kind collisions|
|Data di pubblicazione:||1988|
|Digital Object Identifier (DOI):||http://dx.doi.org/10.1007/BF01016156|
|Appare nelle tipologie:||1.1 Articolo in rivista|