A compact optical biosensor based on a microring resonator is proposed in this work. CMOS compatible technology based on silicon nitride deposited by low-pressure chemical vapour deposition (LPCVD) on silicon oxide has been adopted in the design. Surface sensing has been exploited, to be used in a wide range of biochemical applications, such as DNA sequencing by hybridization, antigen-antibody reactions study or pollution concentration measure in water. A semi-analytic approach supported by finite element method has been proposed to estimate and optimize the device sensitivity. Finally sensor functionality has been proved by finite difference time domain approach

Surface Sensitivity Optimization of a Microring Resonator for Biochemical Sensing

Dell'Olio, Francesco;PASSARO, Vittorio;DE LEONARDIS, Francesco
2006-01-01

Abstract

A compact optical biosensor based on a microring resonator is proposed in this work. CMOS compatible technology based on silicon nitride deposited by low-pressure chemical vapour deposition (LPCVD) on silicon oxide has been adopted in the design. Surface sensing has been exploited, to be used in a wide range of biochemical applications, such as DNA sequencing by hybridization, antigen-antibody reactions study or pollution concentration measure in water. A semi-analytic approach supported by finite element method has been proposed to estimate and optimize the device sensitivity. Finally sensor functionality has been proved by finite difference time domain approach
International Conference on Transparent Optical Networks, ICTON 2006
1-4244-0235-2
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11589/21024
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