In this paper we report on the design, fabrication and characterization of an integrated-optic spiral resonator for angular rate sensing applications. The spiral resonator design has been optimized through a parametric analysis and a minimum angular velocity of about 10°/h, suitable for aerospace applications, has been theoretically predicted. The resonator has been fabricated in silica-on-silicon technology and characterized. Experimental results are in good agreement with the theoretical predictions.
Innovative integrated-optic resonator for angular rate sensing: Design and experimental characterization / Ciminelli, C.; Dell'Olio, F.; Campanella, C. E.; Armenise, M. N. (LECTURE NOTES IN ELECTRICAL ENGINEERING). - In: Sensors and Microsystems : AISEM 2010 Proceedings / [a cura di] Giovanni Neri, Nicola Donato, Arnaldo d'Amico, Corrado Di Natale. - STAMPA. - Dordrecht : Springer, 2011. - ISBN 978-94-007-1323-9. - pp. 345-349 [10.1007/978-94-007-1324-6_54]
Innovative integrated-optic resonator for angular rate sensing: Design and experimental characterization
Ciminelli, C.;Dell'Olio, F.;Campanella, C. E.;Armenise, M. N.
2011-01-01
Abstract
In this paper we report on the design, fabrication and characterization of an integrated-optic spiral resonator for angular rate sensing applications. The spiral resonator design has been optimized through a parametric analysis and a minimum angular velocity of about 10°/h, suitable for aerospace applications, has been theoretically predicted. The resonator has been fabricated in silica-on-silicon technology and characterized. Experimental results are in good agreement with the theoretical predictions.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.